All-strong-state ultraviolet lasers have been widely used in the fields of mechanical flaw detection, lithography, micromachining and medicine for some great benefits of tiny volume, extended everyday living, superior performance, great beam top quality, huge tuning and slim spectral line, and so forth. Making use of high electrical power close to-infrared coherent light-weight resource as the basic frequency supply depending on nonlinear tuning technological innovation, building ultraviolet coherent radiation by multistage frequency conversion is considered to be a significant strategy to build the ultraviolet coherent mild source.
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We summarized the current development position with the significant-energy DUV laser each in the wavelength of FHG of the 1-μm laser and at 193 nm. The recent enhancement with the reliable-state/fiber laser, and also the nonlinear optical crystals, prompts not simply the typical electric power but also the beam quality (coherence) of your DUV lasers to an unparalleled level.
全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
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On the opposite aspect, the power scaling of the NIR laser is an additional component to boost the average electric power of the 193-nm DUV laser. Because of the not enough the substantial-power amplification Remedy of your NIR laser (as an example at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) can be placed on build a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength in addition to acquiring relative better electrical power [21]. Not long ago, a diamond Raman laser confirmed its capability in acquiring a large electric power along with a superior conversion effectiveness with the 1st Stokes with the 1-μm laser [22,23], which suggests the likelihood to get utilized from the 193-nm DUV laser technology because of its superior Raman attain and huge frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the most effective non-linear crystal which generates ultraviolet harmonics in the Nd:YAG elementary laser wavelength. In order to increase the destruction threshold, low CLBO surface roughness, by extremely-precision machining, is required. Since the CLBO crystal has straightforward hydroscopic reaction and micro scratches in machining, extremely-exact machining of the CLBO crystal is a difficult technological dilemma.
The beam profile shown in Figure 7b demonstrated a very good beam high quality as among the list of deserves of Raman laser, which might be helpful to crank out a 193-nm DUV laser with a top quality beam.
The conversion effectiveness from fundamental NIR to DUV is from 5% to 36% according to the claimed ends in Table one. Escalating the conversion performance will decrease the stress on the design and set up of the basic laser amplifier as well as the electrical energy intake. A good beam good quality of the elemental laser will even add into the rising of the conversion efficiency and also the right power intensity from the NIR and inexperienced laser from the SHG and FHG method, respectively. The very best conversion efficiencies from NIR to inexperienced and inexperienced to DUV laser by utilization of CLBO crystal are 70% and all around 50%, respectively [12], which corresponds towards the conversion performance of 35% from elementary to DUV.
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